Single and Mixed Phase TiO2 Powders by Excess Hydrolysis of Titanium Alkoxide

by Material Science

To investigate excess-hydrolysis of titanium alkoxides, TiO2 powders were fabricated from titanium-tetra-isopropoxide... more

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Quantum Quench in the Transverse Field Ising chain I: Time evolution of order parameter correlators

by Maurizio Fagotti

Co-authored with Pasquale Calabrese and Fabian Essler

We consider the time evolution of order parameter correlation functions after a sudden quantum quench of the magnetic... more

Atomic collisions, elastic recombination, and thermal diffusion during thin-film growth from low-energy ion beams

by Nicole Herbots

N. Herbots *, 0. Vancauwenberghe **, O.C. Hellman + and Y.C. Joo ++
Massachusetts Institute of Technology, Cambridge, MA 02139, USA

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volumes 59-60, Part 1, 1 July 1991, Pages 326-331
doi:10.1016/0168-583X(91)95233-4 |

Low-energy (< 1 keV) ions are used in a variety of thin-film techniques. When low-energy ions are used during... more

Quantum ring models and action-angle variables

by Vahagn Yeghikyan

Co-authored with Stefano Bellucci, Armen Nersessian and Armen Saghatelian

We suggest to use the action-angle variables for the study of properties of (quasi)particles in quantum
rings.... more

Dipole transitions and Stark effect in the charge-dyon bound system

by Vahagn Yeghikyan

Co-authored with  L.Mardoyan, A.Nersessian, H.Sarkisyan published in J. Phys.A40 (2007), 5973-5980

We consider the dipole transitions and the linear and quadratic Stark effect in the MICZ-Kepler system interpreting as... more

New insights into the entanglement of disjoint blocks

by Maurizio Fagotti

Journal-ref: 2012 EPL 97 17007

We study the entanglement of two disjoint blocks in spin-1/2 chains obtained by merging solvable models, such as XX... more

Atomic displacement free interfaces and atomic registry in SiO2/(1x1) Si(100). Journal of Applied Physics. Vol 100. No 10 (2006) 104109-10410.

by Nicole Herbots

Shaw, J. M. ; Herbots, N. ; Hurst, Q. B. ; Bradley, D. ; Culbertson, R. J. ; Atluri, V. ; Queeney, K. T.

JOURNAL OF APPLIED PHYSICS Volume: 100 Issue: 10 Article Number: 104109 DOI: 10.1063/1.2358835 Published: NOV 15 2006

We use ion beam analysis to probe the structure and interface of ultrathin thermal oxide films grown on (1x1) Si(100)... more

US patent 7,851,365 issued 12/14/10: "Methods for preparing semiconductor substrates & interfacial oxides there on

by Nicole Herbots

N. Herbots, J.D. Bradley, J.M. Shaw, R.J. Culbertson and V. Atluri


This patent is a result of my research in nanophases, surfaces and thin films and analysis from a 10-year collaboration using my materials synthesis expertise to create the nanophases and characterizing them with Prof. R. J. Culbertson. The second author is our former graduate student Dr. J.D. Bradley, whose PhD research contributed to this patent, and who brought applications via his expertise as engineer working on medical electronics processing and modeling. He is now employed at Medtronic. The third author is another PhD physics graduate student J.M. Shaw (ASU ’06), whose doctoral research also contributed to the concept of this patent and its application in semiconductor physics. Dr. J.M Shaw is now a permanent member of the research staff at NIST. He was trained by Prof. R.J. Culbertson as a physics undergraduate researcher in Ion Beam Analysis to his PhD research in advanced IBA technique and heteroepitaxy. The fifth author is our former graduate student V. Atluri, a chemical engineer who completed his PhD thesis in Materials Science on the chemical synthesis of ordered and passivated oxides with Profs. Herbots and Culbertson in 1998. He is now manager at Intel Corp, in charge of semiconductor technology integration with high density packaging. The keypoint of this patent is the discovery of a new, ordered, silicon nanophase akin to beta-cristobalite identified in part via ion beam analysis, using channeling, surface peak analysis, areal density calculations and Monte-Carlo computer simulations of channeling and blocking to identify the spatial geometry of these new nanophases.

FIELD OF THE INVENTION
This invention relates to methods for preparing semiconductor substrates, the... more

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